cleanroom-metrology-controller

# Cleanroom Metrology Controller ## Purpose The Cleanroom Metrology Controller skill provides comprehensive in-line metrology for nanofabrication process control, enabling precise measurement and monitoring of critical dimensions, film thicknesses, and pattern quality. ## Capabilities - CD-SEM measurement recipes - Spectroscopic ellipsometry analysis - Film thickness mapping - Surface profilometry - Defect inspection - Overlay measurement ## Usage Guidelines ### Metrology Control 1. **CD-SEM Measurements** - Develop automated recipes - Calibrate against reference - Track process variation 2. **Ellipsometry** - Select appropriate model - Map thickness uniformity - Characterize optical constants 3. **Defect Inspection** - Set detection thresholds - Classify defect types - Track yield trends ## Process Integration - All fabrication processes - Analysis Pipeline Validation ## Input Schema ```json { "measurement_type": "cd_sem|ellipsometry|profilometry|defect", "target_parameter": "string", "wafer_map": {"sites": "number", "pattern": "string"}, "specification": { "target": "number", "tolerance": "number" } } ``` ## Output Schema ```json { "measurements": [{ "site": "string", "value": "number", "unit": "string" }], "statistics": { "mean": "number", "std_dev": "number", "range": "number" }, "uniformity": "number (%)", "pass_fail": "boolean", "trending_data": {"dates": [], "values": []} ...